BUSINESS
Angle valve with
soft-pump function
Two Stage Angle Valve for Less Turbulence
for Harsh and Corrosive Processes such as CVD, Etch, …
Easy maintenance
Very simple soft-pumping adjustment
Only one bellows for both main and soft seals
Technical date
| Item | Value |
| Leak rate: valve body, valve seat | < 1 × 10^-9 mbar l·s^-1 |
| Pressure range | 1 × 10^-8 mbar to 5 bar (abs) |
| Differential pressure on the plate - In opening direction - In closing direction | ≤ 2 bar ≤ 5 bar |
| Differential pressure at opening | ≤ 1 bar |
| Cycles until first service | 2 million |
| Temperature - Valve body - Actuator - Position Indicator | ≤ 150 °C ≤ 120 °C ≤ 70 °C |
| Material - Valve body - Plate - Bellows | AL 6061 / SUS 304 SUS 316 SUS 316 |
| Mounting position | Any |
| Position indicator contact rating | NPN & PNP Type 5 - 30V DC, 0 - 200 mA |
| 2 Wire Solid State Type 10 - 30V DC, 1 - 50 mA | |
| Actuator | Pneumatic |
| Size | DN25, DN40, DN50 |